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Fundamental Electron Interactions with Plasma Processing Gases by James K. Oltho

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1 Introduction. - 2 Low Energy Electron-Molecule Interaction Processes. - 3 Significance of Electron-Molecule Interactions in Plasma Processing. - 4 The Present Work. - 5 References. Electron-Molecule Interactions in the Gas Phase: Cross Sections and Coefficients.

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ISBN-13:

9781461347415
Book Title:

Fundamental Electron Interactions with Plasma Processing Gases
ISBN:

9781461347415

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