Einführung in die mikroelektromechanische Systemtechnik, Hardcover von Malu...
84,32 €
Introduction to Microelectromechanical Systems Engineering, Hardcover by Maluf, Nadim, ISBN 0890065810, ISBN-13 9780890065815, Like New Used, Free P&P in the UK Here's a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describes in detail the materials used in producing MEMS - including silicon, polymers, and glass and quartz substrates - as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications.
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