MKS DELTA II DLT2A2-32121 Durchflussverhältnisregler Gas N2 Bereich 20.000 SCCM
2.388,63 €
Range 20,000 SCCM. Widely used in a variety of flow splitting applications such as etch, strip, and CVD, the DELTA II provides the user with the ability to distribute gas or gas mixtures to two different zones in a process chamber.
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