QTY:5 3μm Fork Finger Electrode Capacitive Array MEMS Sensor Chip 6.5*4*0.52mm
269,67 €
The electrode substrate is monocrystalline silicon, silicon dioxide grown on the surface of the wafer, the thickness is 300nm;. Electrode use temperature range: -150C~500C;. Line width: 5um, line spacing: 3um, finger length: 1.6mm, number of fork finger pairs: 75 (150 fingers).
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