Silicon Carbide Microel Ectromechanical Systems for Harsh Environments, Hardc...
135,94 €
Silicon Carbide Microel Ectromechanical Systems for Harsh Environments, Hardcover by Cheung, Rebecca (EDT), ISBN 1860946240, ISBN-13 9781860946240, Brand New, Free shipping in the US This book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. Th contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.
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