Very Large Scale Integration (VLSI): Fundamentals and Applications by D.F. Barbe
123,08 €
1.1 Outlook. - 1.3 Summary. - 2.2 Problem Areas for VLSIC's. - 2.4 VLSIC Projections. - 2.5 Conclusions. Advanced Lithography. - 3.1 Optical Lithography. - 3.2 Electron Lithography.
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