The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2 by B.E. Deal (Engl
211,70 €
The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2. Deposition and Properties of SiO2: Low Temperature Synthesis and Characterization of Silicon Dioxide Films; G.S. Chakravarthy, et al. Chemical, Structural, and Microroughness Effects at the SiSiO2 Interface: Dependence of Surface Microroughness on Types of Silicon Substrates; T. Ohmi, et al.
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