The Physics and Chemistry of SiO2 and the Si-SiO2 Interface by B.E. Deal (Englis
211,70 €
Historical Perspectives of Silicon Oxidation. - The Role of SiO in Si Oxidation at a Si-SiO2 Interface. - Uncertainty Analysis of Analytic Oxidation Models. - Modeling of the Oxide Growth in a Chlorine Ambient.
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